Nama produk |
Formula molekul |
Kemurnian |
Monosilane |
SiH4 |
5N |
PH3+H2 |
PH3(5.5N)+H2(6N) |
|
Ammonia |
NH3 |
6N |
Carbon tetrafluoride |
CF4 |
5N |
TMB+SiH4/H2 |
TMB(2.5N)+SiH4(6N)/H2(6N) |
|
B2H6+H2 |
B2H6(5N)+H2(6N) |
|
Methane |
CH4 |
5N |
Nitrogen |
N2 |
5N |
Helium |
He |
5N |
Argon |
Ar |
5N |
Oxygen |
O2 |
5N |