Product Name

Molecular Formula

Purity

Monosilane

SiH4

6N

Disilane

Si2H6

6N

DichIorosilane

Si2H2CL2

5N

Trichlorosilane

SiHCL3

5N

Silicon tetrachloride

SiCL4

5N

Boron trichloride

BCL3

5N

Hydrogen phosphide

PH3

5.5N

Arsenic hydride

AsH3

5.5N

Borane

B2H6

5N

Germanomethane

GeH4

5N

Ammonia

NH3

6N

Nitrous oxide

N2O

5N

Tungsten hexafluoride

WF6

5N

Boron (tri)fluoride

BF3

5N

Nitrogen trifluoride

NF3

5N

Trifluoromethane

CHF3

5N

Carbon tetrafluoride

CF4

5N

Product Name

Molecular Formula

Purity

Iodotrifluoromethane

CF3i

4.5N

Hexafluoroethane

C2F6

5N

Octafluoropropane

C3F8

5N

Octafluorocyclobutane

C4F8

5N

Chlorine

CL2

5N

Hydrogen chloride

HCL

5N

Hydrobromic acid

HBr

5N

Carbon monoxide

CO

5N

Carbon dioxide

CO2

5N

Nitrogen

N2

6N

Hydrogen

H2

6N

Oxygen

O2

5N

Helium

He

6N

Neon

Ne

6N

 Xenon

Xe

6N

Krypton

Kr

6N

 Argon

Ar

6N