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Special Gas for LCD Manufacturing

Product Name

Molecular Formula

Purity

Silane

SiH4

6N

Nitrogen Trifluorede

NF3

5N

Carbon tetrafluoride

CF4

5N

Sulfur hexafluoride

SF6

5N

Boron trichloride

BCl3

5N

Phosphine

PH3+H2

6N

Diborane

B2H6+H2

B2H6(5N)+H2(6N)

HCL+H2+Ne

HCL(5N)+H2 
(6N)+Ne(6N)

F2+He

F2(5N)+He(6N)





Product Name

Molecular Formula

Purity

Nitrous Oxide

N2O

5N

Carbon dioxide

CO2

5N

Chlorine

Cl2

5N

Ammonia

NH3

6N

Hydrogen

H2

6N

Oxygen

O2

5N

Nitrogen

N2

6N

Argon

Ar

6N

Helium

He

6N

Xenon

Xe

6N

Neon

Ne

6N

Krypton

Kr

6N



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